Supplementary Material

AIP Publishing 2026 Open access

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Authors: Madeleine Petschnigg, Nikolai Andrianov, Syed Azeem, Thomas Grießer, Ke Wang, Steven Shannon, Marco Deluca, Susan E. Trolier-McKinstry
DOI: 10.60893/figshare.jva.31100746
Cited by: 0

Abstract

The Effect of Methane-Hydrogen Gas Admixture on the Selectivity towards Platinum in Dry Etching of PZT Thin Films by Inductively Coupled Plasma Reactive Ion Etching

Fields of Study & Subjects

Plasma Diagnostics and Applications Plasma Applications and Diagnostics Semiconductor materials and devices

Publication details

Journal / source
AIP Publishing
Publication date
1 January 2026
Language
EN