Supporting Information

AIP Publishing 2026 Open access

Read full text
Authors: Abdul Kuddus, Hajime Shirai
DOI: 10.60893/figshare.jva.31356478
Cited by: 0

Abstract

Supporting figures illustrating the optimization of TiOx growth parameters, crystalline characteristics, and high-resolution SEM and EDS analyses that confirm conformal TiOx growth within high-aspect-ratio trenches.

Fields of Study & Subjects

Semiconductor materials and devices Copper Interconnects and Reliability TiO2 Photocatalysis and Solar Cells

Publication details

Journal / source
AIP Publishing
Publication date
9 March 2026
Language
EN