Supplement Material

AIP Publishing 2026 Open access

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Authors: Rita Tilmann, Alexis Franquet, A. A. Merkulov, Lennaert Wouters, Clément Porret, Alexander Pirkl, Paul van der Heide
DOI: 10.60893/figshare.jva.31378675
Cited by: 0

Abstract

Supplementary Materials for Orbitrap{trade mark, serif}-SIMS for Accurate Quantification of Arsenic in SiGe Across Blanket and Fin-Type Geometries

Fields of Study & Subjects

Ion-surface interactions and analysis Semiconductor materials and devices Semiconductor materials and interfaces

Publication details

Journal / source
AIP Publishing
Publication date
9 March 2026
Language
EN