基于疏水聚合物的MEMS气体传感器抗湿方法

Ceshi jishu xuebao 2026 Open access

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Authors: SUN Beibei, LIN Jianhua, XU Chen, GAO Xiaoguang, JIA Jian, He Xiuli

DOI: 10.62756/csjs.1671-7449.2026039

Cited by: 0

Fields of Study & Subjects

Gas Sensing Nanomaterials and Sensors Advanced MEMS and NEMS Technologies Membrane Separation and Gas Transport