RIE-200NLにおけるレジスト材料のエッチングレート比較

ARIM Data Portal 2026 Dataset Open access

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Authors: Naoki Ikeda
DOI: 10.71947/arim.jpmxp1225nm2042-2
Cited by: 0

Fields of Study & Subjects

Advanced Surface Polishing Techniques Laser Material Processing Techniques Plasma Diagnostics and Applications

Publication details

Journal / source
ARIM Data Portal
Publication date
27 January 2026
Language
JA
Document type
Dataset