Synthesis of epitaxial TaO$_2$ thin films on Al$_2$O$_3$ by suboxide molecular-beam epitaxy and thermal laser epitaxy

Tantalum dioxide (TaO2) is a metastable tantalum compound. Here, we report the epitaxial stabilization of TaO2 on Al2O3 (11 ̄02) (r-plane sapphire) substrates using suboxide molecular-beam epitaxy and thermal laser epitaxy, demonstrating single-oriented, monodomain growth of anisotropically strained thin films. Microstructural investigation is performed using synchrotron x-ray diffraction and scanning transmission electron microscopy. The tetravalent oxidation state of tantalum is confirmed using x-ray absorption and photoemission spectroscopy as well as electron energy-loss spectroscopy. Optical properties are investigated via spectroscopic ellipsometry and reveal a 0.3 eV Mott gap of the tantalum 5d electrons. Density-functional theory and group theoretical arguments are used to evaluate the limited stability of the rutile phase and reveal the potential to unlock a hidden metal–insulator transition concomitant with a structural phase transition to a distorted rutile phase, akin to NbO2. Our study expands the understanding of tantalum oxides and paves the way for their integration into next-generation electronic and photonic devices.