Advancing Diamond Microfabrication by Selective Removal of CVD Diamond Surface using Oxygen Plasma.
Fields of Study & Subjects
Diamond and Carbon-based Materials Research
Advanced Surface Polishing Techniques
Plasma Diagnostics and Applications
Publication details
- Journal / source
- HAL (Le Centre pour la Communication Scientifique Directe)
- Publication date
- 11 January 2026
- Language
- EN
- Document type
- Preprint