Plasma-Enhanced Atomic Layer Deposition for Conformal Coating of Manganese Oxide on Carbon Nanowalls
Fields of Study & Subjects
Supercapacitor Materials and Fabrication
Semiconductor materials and devices
Graphene research and applications
Publication details
- Journal / source
- Tokyo Tech Research Repository (Tokyo Institute of Technology)
- Publication date
- 16 January 2026
- Language
- EN
- Document type
- Thesis