Microring Resonator Dispersion Metrology with Neural Networks

Precise knowledge of resonator dispersion, from both geometric and material contributions, is essential for reliable high-performance nonlinear integrated photonics devices, such as optical parametric oscillators, frequency doublers, and integrated optical frequency combs. However, direct measurements at the fabrication level provide limited knowledge, whether through destructive cross-section imaging or non-destructive ellipsometry, while complete optical characterization that enables precise dispersion metrology is time-consuming and poorly suited for mass-scale foundry fabrication. In this work, we develop a machine learning framework to solve three complementary problems: (i) predicting resonator geometric dimensions, (ii) identifying the correct material dispersion, and last, but not least, (iii) precisely reconstructing the integrated dispersion spectrum directly from ring dimensions. These three neural networks together enable both inverse and forward characterization of microring resonators. Using numerically generated datasets based on Sellmeier-type material models, we demonstrate