空圧駆動自励振動アクチュエータの特性評価

Tokyo Tech Research Repository (Tokyo Institute of Technology) 2026

Authors: 田中翔真, Shoma Tanaka, 難波江裕之, Hiroyuki Nabae, 鈴森康一, Koichi Suzumori1
Cited by: 0

Fields of Study & Subjects

Hydraulic and Pneumatic Systems Advanced MEMS and NEMS Technologies Piezoelectric Actuators and Control

Publication details

Journal / source
Tokyo Tech Research Repository (Tokyo Institute of Technology)
Publication date
10 February 2026
Language
JA