Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価

Institutional Repositories DataBase (IRDB) 2026

Authors: Hisashi Takahata, 栗岡 智行, Tomoyuki Kurioka, 山田 虎人, Torauto Yamada, 向出 千隼, Chihaya Mukaide, Katsuyuki Machida, Chen Chun-Yi, Chun Yi Chen, Chang Tso-Fu Mark, Tso-Fu Mark Chang
+5 more 三宅 美博, Yoshihiro Miyake, 伊藤 浩之, Hiroyuki Ito, Masato Sone
Cited by: 0

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical Engineering and Vibrations Research Metal and Thin Film Mechanics

Publication details

Journal / source
Institutional Repositories DataBase (IRDB)
Publication date
24 February 2026
Language
JA